Clean Room Facility for Semiconductor Processing and Device Fabrication
| The Departments of Physics
and Electronics
jointly maintain a semiconductor processing facility, which is available
to research groups in the university and also by arrangement to outside
organisations. For further information contact Dr.
David Inglis.
This clean room facility meets Class 35 (American Class 100)
requirements for semiconductor processing and device fabrication. The
room is sealed, air entering the clean room through High Efficiency
Particulate Air ( HEPA ) filters, and is maintained at 60Pa above
ambient pressure. The room contains essential fabrication and testing
equipment while air compressors, water purifiers, and gas supplies are
located outside the clean room. Equipment Manuals: |
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Microfluidic devices fabricated by David Inglis in the clean room facility. |